The 253B-20-2CF-1 Exhaust Throttle Valve regulates the removal of gas from a processing system. It features a 0.779 inch (20 mm) nominal inside diameter and a 2.75 inch CF Flange. A flapper O-ring is included. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The Type 253 is available in standard sizes and flange styles, and is compatible with all MKS throttle valve controllers.
Технические характеристики
- Type Exhaust Throttle Valve
- Flange Type CF
- Flange Size 2.75 in.
- Inner Diameter 0.779 in. (20 mm)
- Valve Drive Mechanical (non belt) drive with integral cosine generator
- Valve Speed 7.5 s
- Resolution 1/10,000
- Flapper O-ring Yes
- Helium Leak Rate 1 x 10-8 scc/sec
- Closed Leakage
- Operating Temperature Range Valve Body: 0 — 90°C
Valve Motor: 0 — 70°C - Maximum Differential Pressure Across Valve 1 Atmosphere
