Технические характеристики
| Model name | C15740-01 |
|---|---|
| Supported wafer size | 100 mm (4 inches) or 150 mm (6 inches) (other sizes negotiable) |
| Measurement time | Approx. 12 minutes (Objective lens 10×, PL measurement, 4 inch wafers) |
| PL measurement wavelength | R, G, B |
| Spatial resolution | 1 μm/pixel (standard mode), 0.5 μm/pixel (high resolution mode) |
| Measurement items | Shape abnormality, PL intensity, PL wavelength abnormality |
| External dimensions / weight | 2000 mm (W) × 1878 mm (H) × 1130 mm (D) / Approx. 1800 kg |
| Clean room | Compatible |
