The GTS70VCC is a compact, longest travel, platform, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.6 &mu,m Minimum Incremental Motion, a travel range of 70mm and 70N load capacity. Features include: a vertical guide system composed of matched pairs of recirculatiing crossed roller bearings, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion and shaft mounted rotary encoder. The GTS70VCC does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS70VCC is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 70 mm.
Технические характеристики
- Travel Range 70 mm
- Minimum Incremental Motion 0.25 m
- Maximum Speed 5 mm/s
- Centered Load Capacity 70 N
- Accuracy, Guaranteed ±,1.75 m
- Bi-directional Repeatability, Guaranteed ±,0.5 m
- Pitch, Guaranteed ±,80 rad
- Roll, Guaranteed ±,80 rad
- Straightness Typical (Guaranteed) ±,5.0 m
- Weight 4.35 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Compliance RoHS 3, CE
