The M-IMS1000LM-SA-S Linear Stage is designed for self-supporting applications with a 1000 mm travel range. The extreme stiffness of the FEM-optimized aluminum body allows mounting on 4-pts, without degrading its performance making it ideal for delay lines and other applications on non-flat mounting surfaces. The linear motor employs a centered, high efficiency 3-phase synchronous iron core, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, DNA sequencing or laser machining.
Технические характеристики
- Travel Range 1000 mm
- Maximum Speed1 1000 mm/s
- Minimum Incremental Motion 20 nm
- Continuous Motor Force 100 N
- Peak Motor Force 210 N
- Centered Load Capacity 100 N
- Accuracy, Typical ±,4.0 m
- Accuracy, Guaranteed ±,12.0 m
- Bi-directional Repeatability, Typical ±,0.12 m
- Bi-directional Repeatability, Guaranteed ±,0.50 m
- Pitch, Typical ±,112 rad
- Pitch, Guaranteed ±,225 rad
- Compliance in Pitch 2 rad/Nm
- Yaw, Typical ±,40 rad
- Yaw, Guaranteed ±,150 rad
- Compliance in Yaw 1 rad/Nm
- Compliance in Roll 2 rad/Nm
- Drive Type Linear Motor
- Encoder Resolution 1 Vpp 20 m pitch
- Limit Switches Optical
- Origin Optical
- Origin Repeatability ±,0.05 m
- Thread Type M6
- Weight 28 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Compliance RoHS 3, CE
