Description
The EM ACE600 is a versatile high vacuum film deposition system, designed to produce very thin, fine-grained, and conductive metal and carbon coatings for the highest resolution analysis, as
required for FE-SEM and TEM applications. This fully automated table-top coater includes an integrated oil-free pumping system, quartz crystal film thickness measurement and three axis motorized stage (rotation, optional tilt and height).
Технические характеристики
The EM ACE600 can be configured for the following up to two methods:
Carbon thread evaporation (I)
Sputtering (II)
Carbon rod evaporation (III)
e-beam evaporation (IV)
Glow discharge
EM VCT adaptation for cryo-coating, freeze-fracture, double-replica,
freeze-etching and environmental transfer with the VCT Shuttle
