Технические характеристики
- Type Mass Flow Controller
- Calibration Gas N2 (or equivalent)
- Full Scale Flow Range 20,000 sccm
- Maximum Inlet Pressure 150 psig
- Normal Operating Pressure Differential 10 — 40 psid
- Proof Pressure 1000 psig
- Burst Pressure 1500 psig
- Fitting Type 0.25 in. Swagelok-style
- Control Range 400 — 20000 sccm
- Flow Input Output Signal 0 — 5 VDC
- Connector Type 15-pin D-sub (tied grounds)
- Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability ± 0.3% of Reading
- Resolution 0.1% of Full Scale
- Zero Temperature Coefficient
- Span Temperature Coefficient
- Inlet Pressure Coefficient
- Typical Settling Time
- Warm-up Time 30 minutes
- Operating Temperature Range 10 — 50°C
- Storage Humidity 0 — 95% Relative Humidity, non-condensing
- Storage Temperature Range -20 to 80°C
- External Leak Integrity
- Leak Integrity Through Closed Valve Up to 10K valve
- Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
- Seal Material Metal
- Surface Finish 10µ inch average Ra (electropolished)
- CE Certified Yes
