Технические характеристики
- Type Mass Flow Controller
- Calibration Gas N2 (or equivalent)
- Full Scale Flow Range 100 sccm
- Maximum Inlet Pressure 150 psig
- Normal Operating Pressure Differential 10 to 40 psid
- Proof Pressure 1000 psig
- Burst Pressure 1500 psig
- Fitting Type 0.25 in. Swagelok-style
- Control Range 2 — 100 sccm
- Flow Input Output Signal 0 — 5 VDC
- Connector Type 15-pin D-sub (tied grounds)
- Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability ±0.3% of Reading
- Resolution 0.1% of Full Scale
- Zero Temperature Coefficient
- Span Temperature Coefficient
- Inlet Pressure Coefficient
- Typical Settling Time
- Warm-up Time 30 minutes
- Operating Temperature Range 10 — 50°C
- Storage Humidity 0 to 95% Relative Humidity, non-condensing
- Storage Temperature Range -20 to 80°C
- External Leak Integrity -09 (scc/sec He)
- Leak Integrity Through Closed Valve Up to 10K valve
- Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Seal Material Viton
- CE Certified Yes
