The Edwards STPH301CV TMS DN100CF is an oil-free turbomolecular vacuum pump with a magnetically suspended rotor. It offers proven reliability and high performance for flexible process use. This pump is approved by major OEMs for semiconductor and magnetics industries.
Specifications:
- YT3416005
- Pumping speed (N?/H?) , l/s: 300/200
- Inlet flange: ISO100F
- Output flange: KF40
- Maximum possible outlet pressure, Pa: 660
- Nominal rotation speed, rpm: 48000
- Engine power, kW: 0.6
- Series: STPH301
- Flange type: CF
