The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions. The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard. The TTS series can be used for 2 to 3 FOUPs of EFEM without a track. Structure — Telescopic horizontal articulated type — Arm — Single arm — Double arm Cleanliness*2 — ISO Class 1 — — Hand specification*3 — — — — — Edge gripper / Vacuum Controller — D60 — Teach pendant Robot haness (1-5m)*4 — Operation box Software — Standard software for oparation — KRET KMTerm — KR3D KSUtility Lite — KSUtility Manual — Operation manual — — Communication command manual — — Introduction procedure for integrated package software (K-Fast) — —
Технические характеристики
CharacteristicsTypearticulatedNumber of axes4-axis, 5-axisFunctionhandlingApplication domainfor clean roomsOther characteristicshigh-speed, high-precisionPayload
0.7 kg (1.543 lb)
Reach
1,066 mm (41.97 in)
Repeatability
0.1 mm (0.0039 in)
