Технические характеристики
- Travel Range 0.1 mm
- Axes of Travel XY
- Axial Load Capacity 110/95 N
- Vertical Load Capacity 75 N
- Axial Stiffness 1.1 N/m / 0.95 N/m
- Feedback Strain-gauge
- Cable Length 0.6 m vacuum / 2 m air
- Vacuum Compatibility 10-6 Torr
- Capacitance 1.8 F
- Closed Loop Repeatability, Typical 36 nm
- Closed Loop Resolution 4 nm
- Closed Loop Travel 80 m
- Open Loop Resolution 0.4 nm
- Open Loop Travel 100 m
- Resonant Frequency, Unloaded 380/480 Hz
- Weight 175 g
- RoHS Compliant
