| Ambient Operating Temperature | |
| Ambient Storage Temperature | |
| Base Pressure | <!— ‘inside MultiLine 1 value’:< 1 x 10-10 Torr|- <!— ‘multilineKeyVal pipe value’:< 1 x 10-10 Torr
- < 1 x 10-10 mbar
- —> -10 Torr
- -10 mbar
- <!— Base Pressure|MultiLine::< 1 x 10-10 Torr|
|
| Compression Ratio H2 | |
| Compression Ratio He | |
| Compression Ratio N2 | |
| Cooling Method | |
| Flange Type | |
| Foreline Flange Size | |
| Height | |
| Length | |
| Maximum Gas Throughput — He, Water Cooling | |
| Maximum Gas Throughput — N2, Water Cooling | - 380 sccm <!— Maximum Gas Throughput — N2, Water Cooling::
380 sccm —>
|
| Noise Level | |
| Pumping Speed — H2 | |
| Pumping Speed — He | |
| Pumping Speed — N2 | |
| Standards and Certifications | - EN 61010-1
EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU <!— Standards and Certifications::EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU —>
|
| Weight | |
| Width | |