| Ambient Operating Temperature | |
| Ambient Storage Temperature | |
| Base Pressure | - -10 mbar <!— Base Pressure::
|
| Compression Ratio Ar | |
| Compression Ratio H2 | |
| Compression Ratio He | |
| Compression Ratio N2 | |
| Cooling Method | - <!— ‘multilineKeyVal pipe value’:Air cooling
- Water cooling
- —> Air cooling
- Water cooling
|
| Diameter | |
| Flange Type | |
| Foreline Flange Size | |
| Height | |
| Length | |
| Maximum Gas Throughput — Ar, Water Cooling | |
| Maximum Gas Throughput — N2, Water Cooling | |
| Noise Level | |
| Pumping Speed — Ar | |
| Pumping Speed — H2 | |
| Pumping Speed — He | |
| Pumping Speed — N2 | |
| Standards and Certifications | - CE, C-CSA-US, RoHS
compliant as per 2011/65/UE <!— Standards and Certifications::CE, C-CSA-US, RoHS compliant as per 2011/65/UE —>
|
| Weight | |
| Width | |