The RGV100HL-S Compact Rotation Stage provides ultra-fast rotation, very high resolution, and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology. Direct-drive technology eliminates the worm gear of traditional rotation stages providing higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times. A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. Precision is ensured by a high-resolution glass scale with 15,000 line pairs per revolution that directly measures the position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage»s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The RGV100HL features a proprietary 4-point contact ball bearing. This unique, 2-piece design minimizes the number of parts resulting in a more compact stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications. A 30 mm diameter through-hole allows easy routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV100HL also features two limit switches that can be enabled or disabled by an external switch.
Технические характеристики
- Angular Range 360°
- Maximum Speed 720°/s
- Minimum Incremental Motion 0.10 mdeg
- Continuous Motor Torque 2 N·,m (rms)
- Peak Motor Torque 16 N·,m
- Centered Load Capacity 100 N
- Uni-directional Repeatability, Typical ±,0.10 mdeg
- Uni-directional Repeatability, Guaranteed ±,0.15 mdeg
- Bi-directional Repeatability, Typical ±0.15 mdeg
- Accuracy, Typical ±,3.0 mdeg
- Accuracy, Guaranteed ±,5.0 mdeg
- Wobble, Typical ±,7.0rad
- Wobble, Guaranteed ±,20 rad
- Eccentricity, Typical ±,1.0 m
- Eccentricity, Guaranteed ±,1.5 m
- Inertia 0.00123 kg·,m2
- Transversal Compliance 15 rad/N·,m
- Origin Optical, centered
- Origin Repeatability ±,0.1 mdeg
- Limit Switches Two optical limit switches at approx. ±,168, disabled by external switch
- Encoder Resolution 1 Vpp 0.024 pitch
- MTBF 20,000 h (25% load, 30% duty cycle)
- Aperture Diameter 30 mm
- Thread Type M4 and M6
- Maximum Power Consumption 100 W
- Weight 3.6 kg
- Compliance RoHS 3, CE
