Технические характеристики
- Type Vacuum Isolation Valve
- Configuration Angle
- Flange Type ISO-KF
- Flange Size NW40
- Port Size 1.5 in.
- Vacuum Range 15 psig to 1.0 x 10-9 Torr
- Valve Actuation Pneumatic
- Actuation Time Opening: 1.0 sec.
Closing: 2.0 sec.
- Body Material Type 304 stainless steel
- Nose Seal Material Viton
- Bonnet Seal Material Viton
- Helium Leak Rate 1.0 x 10-9 std cc/sec
- Limit Switch No
- Cylinder Volume 2.8 x 10-3 Ft3 (8.0 x 10-5 m3)
- Cylinder Air Pressure Min: 50 psig
Max: 120 psig