The new vacuum transducer VSL measures absolute pressure in the range of 1200….1e-4 mbar as well as relative pressure in relation to the environment in the range of -1260…+940 mbar. The metal sealed gauge head uses multi sensor technology combining two piezo sensors with a Pirani. Users thus profit from a reliable, space- and cost-saving solution. This gauge is designed in particular for the challenges involved in load lock applications and easy to integrate in the plant control system.
Технические характеристики
CharacteristicsTechnologywith combined piezo/Pirani sensor
