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The KQ150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
Features:
- New touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Capable of achieving vacuum of 5 x 10-5 mbar
Available in three configurations:
- KQ150T-S Plus – an automatic sputter coater for non-oxidising metals. Sputtering targets include, Cr, Ir, W, ITO, Al other targets available
- KQ150T-E Plus – an automatic carbon cord coater for SEM applications such as EDS and WDS.Metal evaporation/aperture cleaning option available.
- KQ150T-ES Plus – a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.
Metal evaporation/aperture cleaning option available.
Recommended applications:
- High-resolution magnification SEM
- Protective platinum layers for FIB
- R&D of corrosion-, friction-, and wear protective layers
- Protective layers on medical devices
- BSE imaging
- EDX, WDS, EBSD analysis
- Carbon coating of replicas
Технические характеристики
KQ150T-E-Plus
