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The KQ150R Plus is suitable for use with Tungsten/LaB6 SEM and Benchtop SEM. Typically used for sputter coating of noble metals using the KQ150R S & ES Plus. Recommended for magnifications of up to x 50k using Au, Au/Pd and up to x 100k using Pt (optional). Carbon cord coating for elemental analysis using the Q150R E & ES Plus.
Features:
- Capable of achieving vacuum of 2 x 10-2 mbar
- New touch and swipe capacitive screen
- USB port for upgrades and download of log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user, according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Interchangeable stage options and plug-in heads
Available in three configurations:
- KQ150R-S Plus – an automatic sputter coater for non-oxidising metals. Available sputtering targets including gold, gold/palladium and platinum.
- KQ150R-E Plus – an automatic carbon cord coater for SEM applications such as EDS and WDS.
- KQ150R-ES Plus – a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.
Recommended applications:
- Low and medium magnifications
- SE signal boost (improved SE yield) when coating with as little as 1nm or less of Au, Au/Pd, Pt
- Table-top SEM coating
- Elemental analysis
- Copper metallisation layers for SEM
- For Research Use Only
Технические характеристики
KQ150R-E Plus



