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Технические характеристики
The generators of the TruPlasma MW Series are based on solid-state technology and achieve a significantly higher frequency accuracy than magnetron-based microwave generators. The innovative platform concept can efficiently and economically realize maximum plasma densities and even very demanding process requirements. The modular structure also enables precise scaling of the output power. The power supply remains stable at all times without any impairment to the process quality. The TruPlasma MW Series ensures the best results and maximum reliability in the production of semi-conductors, photovoltaic cells and displays thanks to modern process functions. Precise and fast pulse shaping Innovative pulsing in the nano second range enables better plasma process control. Smart auto frequency tuning Automatic frequency adaptation guarantees an optimum process result and high reproducibility. Synchronous phases Different generators can be operated and pulsed phase-synchronously in multi-antenna systems. By varying the phase coherence between the individual generators, extensive plasma homogeneity can be achieved. Robust design You can rely on the function of the generator – the process quality is not impaired even in the event of a mismatch. Reliable process control Benefit from highly precise digital frequency modulation which ensures reproducible process results, maximum coating quality and productivity. Communication with several generators in real time You can control the machine very quickly within a millisecond with the digital EtherCat interface. This enables precise plasma distribution.
