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The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1µm for magnification 10-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm
Size specifications for SEM mounts A-R. Further technical information on Pelotec CDMS.
Технические характеристики
STP684-1
