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Advanced MEMS technologies have been applied to incorporate many improvements into this truly unique next generation Holey Silicon Nitride Support Membrane. Holey membranes or support films are also referred to as perforated or patterned films, there is no film or membrane covering the holes. The platform for this holey silicon nitride support film is the low stress 200nm amorphous silicon nitride support film on a circular 3mm silicon frame with a 0.5 x 0.5mm window. There are twelve hole sizes available ranging from 100nm to 5µm. This design has a number of advantages over previously offered products:
- Large open area
- Closely packed, higher pore density using hexagonal pore pattern
- Added resilience of membrane
- Practical hole size for experiments
- TEM standard circular shape and size
- EasyGrip edge for improved handling
The PELCO Silicon Nitride Support Films are resistant to solvents, acids and bases, allowing for dynamic experiments directly on the holey membrane. The Silicon Nitride Support Films allow for high temperature experiments/imaging up to 1000 deg. C. Films can be easily cleaned using glow discharge or plasma cleaning techniques. They also provide a carbon-free background for TEM imaging and analysis. The clean manufacturing techniques avoid the debris particles that are often found on other makes of silicon nitride support films.
Product Specifications
Defining parameters for the PELCO Holey Silicon Nitride Support Films are:
- Membrane Thickness: 200nm for added resilience
- Window Size: 0.5 x 0.5mm
- Pore Diameter: Sizes are within 10% of diameter
- Pattern: Close packed hexagonal arrangement of rows and columns — see table
- Perforated Area: See table
- Nominal Porosity: Range between 22.3% to 22.8%
- Frame Thickness: Silicon support structure is 200um standard. This allows for fitting in standard TEM holders and gives a sturdy support frame
- Surface Roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
- Frame Diameter: TEM standard 3mm diameter disc, fully compatible with regular TEM holders and with EasyGrip edges for improved handling
- Packaging: The PELCO Holey Silicon Nitride Support Films are packaged under cleanroom conditions in the PELCO TEM Grid Storage Box. Each box holds 10 support films.
HOLE SIZE
PORE TYPE
PITCH um
ARRAY
A
B
C
5000nm
circular
10.0um
90 x 90
450um
450um
25um
2500nm
circular
5.0um
45 x 45
450um
450um
25um
1250nm
circular
2.5um
180 x 180
450um
450um
25um
1000nm
circular
2.0um
225 x 225
450um
450um
25um
750nm
circular
1.5um
300 x 300
450um
450um
25um
500nm
circular
1.0um
450 x 450
450um
450um
25um
400nm
circular
0.80um
562 x 562
450um
450um
25um
300nm
circular
0.60um
750 x 750
450um
450um
25um
250nm
circular
0.50um
900 x 900
450um
450um
25um
200nm
circular
0.40um
1125 x 1125
450um
450um
25um
150nm
circular
0.40um
1125 x 1125
450um
450um
25um
100nm
circular
0.20um
375 x 375
75um
75um
212.5um
Технические характеристики
HOLE SIZE
