The 8081M-UHV XYZTxTy Motorized Five-Axis Tilt Aligner which increases the utility of our popular kinematic stages by motorizing each of the axes can now be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. The Picomotor™ actuators to each stage allows the same better than
Технические характеристики
- Axes of Travel X, Y, Z, x, y
- Mechanism Kinematic
- Drive Type Picomotor
- Travel Range 3 mm
- Angular Range x=8°, y=10°
- Load Capacity 13 N
- Minimum Incremental Motion
- Angular Resolution x, y≤0.7 rad
- Vacuum Compatibility 10-9 Torr
- Wire Type Kapton Ribbon Ultrahigh Vacuum Rated
- Connector Type DB15 Female
- Operating Temperature 10 to 40°C
- Thread Type M4 and M6
