The RGV160BL-S Direct Drive Rotation Stage provides ultra-fast rotation, very high resolution, and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology. Direct-drive technology eliminates the worm gear of traditional rotation stages providing higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times. A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. Precision is ensured by a high-resolution glass scale with 28,800 line pairs per revolution that directly measures the position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage»s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The RGV160BL features a proprietary 4-point contact ball bearing. This unique, 2-piece design minimizes the number of parts resulting in a more compact stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications. A 30 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV160BL does not include limit switches nor hard stop.
Технические характеристики
- Angular Range 360°
- Maximum Speed 1000°/s
- Minimum Incremental Motion 0.04 mdeg
- Continuous Motor Torque 20 N·,m (rms)
- Peak Motor Torque 112 N·,m
- Centered Load Capacity 2700 N
- Uni-directional Repeatability, Typical ±,0.05 mdeg
- Uni-directional Repeatability, Guaranteed ±,0.15 mdeg
- Bi-directional Repeatability, Typical ±0.15 mdeg
- Accuracy, Typical ±,3.0 mdeg
- Accuracy, Guaranteed ±,7.5mdeg
- Wobble, Typical ±,5.0rad
- Wobble, Guaranteed ±,10rad
- Eccentricity, Typical ±,0.8 m
- Eccentricity, Guaranteed ±,2.0 m
- Inertia 0.0241 kg·,m2
- Transversal Compliance 1.0 rad/N·,m
- Origin Optical, centered
- Origin Repeatability ±,0.05 mdeg
- Limit Switches Two optical limit switches at approx. ±,168, disabled by external switch
- Encoder Resolution 1 Vpp 0.0125 pitch
- MTBF 20,000 h (25% load, 30% duty cycle)
- Aperture Diameter 110 mm
- Thread Type M4 and M6
- Weight 17.5 kg
- Compliance RoHS 3, CE
