The RGA150 low-profile and large aperture rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150 can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation or any general positioning application that requires fast positioning.
Технические характеристики
- Angular Range 360
- Maximum Speed 1800 /s
- Minimum Incremental Motion 0.01 mdeg
- Peak Motor Torque 11 Nm
- Centered Load Capacity 50 N
- Bi-directional Repeatability, Typical ±,0.0975 mdeg
- Accuracy, Typical ±,4 mdeg
- Accuracy, Guaranteed ±,8 mdeg
- Wobble, Typical ±,12 rad
- Wobble, Guaranteed ±,26 rad
- Eccentricity, Typical ±,0.5 m
- Eccentricity, Guaranteed ±,1 m
- MTBF 20,000 hours @ 30% duty cycle
- Cable Length 5 m
- Aperture Diameter 90 mm
- Weight 4.5 kg
- Compliance RoHS 3, CE, UKCA
