The GTS70V is a compact, longest travel, platform, vertical stage that combines outstanding trajectory accuracy with high precision capability of 0.1 &mu,m Minimum Incremental Motion and a travel range of 70 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion and a linear encoder for high accuracy. The GTS70V does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS70V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 70 mm.
Технические характеристики
- Travel Range 70 mm
- Minimum Incremental Motion 0.10 m
- Maximum Speed 10 mm/s
- Centered Load Capacity 40 N
- Accuracy, Guaranteed ±,1.0 m
- Bi-directional Repeatability, Guaranteed ±,0.2 m
- Pitch, Guaranteed ±,80 rad
- Roll, Guaranteed ±,80 rad
- Straightness Typical (Guaranteed) ±,5.0 m
- Weight 4.35 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Compliance RoHS 3, CE
