The ONE-XY200HA is a high accuracy version of an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 190 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.
Технические характеристики
- Motorized Axes XY
- Travel Range 190 mm
- Maximum Speed 200 mm/s
- Minimum Incremental Motion 50 nm
- Maximum Acceleration 0.2 G
- Continuous Motor Force 20 N
- Peak Motor Force 42 N
- Centered Load Capacity 150 N
- Accuracy, Guaranteed ±,0.4 m
- Bi-directional Repeatability, Guaranteed ±,0.090 m
- Flatness, Typical ±,2.0 m
- Straightness, Typical ±,2.0 m
- Orthogonality 5 rad
- Pitch, Guaranteed ±,75 rad
- Yaw, Guaranteed ±,75 rad
- Roll, Typical ±,36 rad
- Drive Type Linear Motor
- Origin Repeatability ±,0.1 m
- Cable Length 3 m
- Width 275 mm
- Weight 12 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Compliance RoHS 3, CE
