The XML210-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 210 mm. Innovative and compact, XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications requiring excellent dynamic response.
Технические характеристики
- Travel Range 210 mm
- Maximum Speed 300 mm/s
- Minimum Incremental Motion1 1 nm
- Continuous Motor Force 50 N
- Peak Motor Force 240 N
- Centered Load Capacity 300 N
- Accuracy, Typical ±,0.5 m
- Accuracy, Guaranteed ±,1.5 m
- Bi-directional Repeatability, Typical ±,0.032 m
- Bi-directional Repeatability, Guaranteed ±,0.040 m
- Flatness Typical (Guaranteed) ±,0.75 (±,1.50) m
- Straightness Typical (Guaranteed) ±,0.75 (±,1.50) m
- Pitch, Typical ±,15 rad
- Pitch, Guaranteed ±,50 rad
- Compliance in Pitch 2.0 rad/Nm
- Yaw, Typical ±,10 rad
- Yaw, Guaranteed ±,40 rad
- Compliance in Yaw 1.0 rad/Nm
- Compliance in Roll 0.5 rad/Nm
- Drive Type Linear Motor
- Origin Repeatability ±,0.025 m
- Thread Type M4 and M6
- Weight 13 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Maximum Power Consumption 100 W
- Compliance RoHS 3, CE
