The XMS160-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 160 mm. Innovative and compact, XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM-S stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications with high dynamic response.
Технические характеристики
- Travel Range 160 mm
- Maximum Speed 300 mm/s
- Minimum Incremental Motion1 1 nm
- Continuous Motor Force 25 N
- Peak Motor Force 100 N
- Centered Load Capacity 100 N
- Accuracy, Typical ±,0.5 m
- Accuracy, Guaranteed ±,0.75 m
- Bi-directional Repeatability, Typical ±,0.030 m
- Bi-directional Repeatability, Guaranteed ±,0.040 m
- Flatness Typical (Guaranteed) ±,0.37 (±,0.75) m
- Straightness Typical (Guaranteed) ±,0.37 (±,0.75) m
- Pitch, Typical ±,12 rad
- Pitch, Guaranteed ±,25 rad
- Compliance in Pitch 2.0 rad/Nm
- Yaw, Typical ±,10 rad
- Yaw, Guaranteed ±,25 rad
- Compliance in Yaw 2.0 rad/Nm
- Compliance in Roll 1.5 rad/Nm
- Drive Type Linear Motor
- Origin Repeatability ±,0.025 m
- Thread Type M4 and M6
- Weight 4.5 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Maximum Power Consumption 70 W
- Compliance RoHS 3, CE
