The M-IMS600CCHA Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life, FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. An integral linear scale provides 0.1 &mu,m resolution feedback, improving precision. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.
Технические характеристики
- Travel Range 600 mm
- Maximum Speed 200 mm/s
- Minimum Incremental Motion 200 nm
- Centered Load Capacity 600 N
- Axial Load Capacity (+Cx) 30 N
- Inverse Axial Load Capacity (-Cx) -30 N
- Accuracy, Typical ±,3.5 m
- Accuracy, Guaranteed ±,6.5 m
- Uni-directional Repeatability, Typical ±,0.12 m
- Uni-directional Repeatability, Guaranteed ±,0.25 m
- Bi-directional Repeatability, Typical ±,0.20 m
- Bi-directional Repeatability, Guaranteed ±,0.5 m
- Pitch, Typical ±,50 rad
- Pitch, Guaranteed ±,125 rad
- Compliance in Pitch 0.2 rad/Nm
- Yaw, Typical ±,30 rad
- Yaw, Guaranteed ±,75 rad
- Compliance in Yaw 1 rad/Nm
- Compliance in Roll 1 rad/Nm
- Drive Type DC Motor
- Feedback Linear Encoder
- Origin Repeatability ±,0.1 m
- Cable Length 5 m
- Thread Type M6
- Weight 22 kg
- MTBF 20,000 h (25% load, 30% duty cycle)
- Maximum Power Consumption 170 W
- Compliance RoHS 3, CE