For equipment and process control The sensors provide the lowest flow sensing capability for leakage and replacement of mechanical detectors. FS5200 series mass flow sensors are designed for general purpose flow metering and control applications and are made with Siargo’s proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow with a very low pressure loss. The current models can be readily applied to oil and gas process monitor, leakage detection, and other applications such as an alternative to the bubble flow meter. FS5200 can measure a flow down to 0.2 sccm and up to 300 SLPM. The connectors can be fully customized. Flow range 0~0.02…300 SLPM Accuracy ±(1.5+0.2FS) % Repeatability 0.25 % Response time 200 msec Power supply 8~24 (50mA) Vdc Output Linear analog: 0.5~4.5 Vdc / Digital: I2C Pressure loss (max.) 0.03 @0.02 SLPM kPa Pressure rating 1.0 MPa Temperature -10 ~ 55 °C Humidity
Технические характеристики
CharacteristicsTechnologymassApplicationsairOther characteristicsanalog output, smart
