For instrumentation and manifold The sensors are designed for instrumentation and/or manifold assembly. It has two version — low flow up to 1000sccm high flow to 4SLPM. This serial of mass flow sensors are designed with manifold installation configuration for gas mass flow measurement utilizing the Company’s proprietary MEMS sensing technology. Instrumentation and automation are two targeted applications. ®Designed for manifold installation ®Fast response time, customizable to 10 msec ®Laminar flow in full dynamic range ®Both analog and digital interface ®Large turn-down ration over 100:1 ®High/low flow applications Applications *Laboratory flow measurement *GC mass spectrometers *Leakage detection *Instrumentation *Process monitor with dry gases *Automation Flow range — 0-200… 1000 — 0 ~ 2000… 6000 — seem Accuracy — ±(2.0+0.5FS) — % Turn-down ratio — > 100:1 Power consumption —
Технические характеристики
CharacteristicsTechnologymassApplicationsgasOther characteristicsanalog output
