The G-Series GE50A013204SMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 20,000 sccm and a control range of 400 to 20,000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.
Технические характеристики
- Type Mass Flow Controller
- Calibration Gas N2 (or equivalent)
- Full Scale Flow Range 20000 sccm
- Maximum Inlet Pressure 150 psig
- Normal Operating Pressure Differential 150 psig
- Proof Pressure 1000 psig
- Burst Pressure 1500 psig
- Fitting Type 0.25 in. Swagelok-style
- Control Range 400 — 20000 sccm
- Flow Input Output Signal 0 — 5 VDC
- Connector Type 15-pin D-sub (tied grounds)
- Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability ±0.3% of Reading
- Resolution 0.1% of Full Scale
- Zero Temperature Coefficient
- Span Temperature Coefficient
- Inlet Pressure Coefficient
- Typical Settling Time
- Warm-up Time 30 minutes
- Operating Temperature Range 10 — 50°C
- Storage Humidity 0 to 95% Relative Humidity, non-condensing
- Storage Temperature Range -20 to 80°C
- External Leak Integrity -09 (scc/sec He)
- Leak Integrity Through Closed Valve Up to 10K valve
- Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Seal Material Viton
- Surface Finish 16µ inch average Ra
- CE Certified Yes
