The G-Series GE50A013101RMV020 Mass Flow Controller features a full scale flow range of 10 sccm and is calibrated for Nitrogen (N2) gas. It has a Swagelok 4 VCR male fitting and 15-pin type D connector with tied grounds for 0 to 5 VDC mass flow control. The normally closed valve features Viton seal materials. G Series mass flow controllers utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the nitrogen calibration gas.
Технические характеристики
- Series G Series
- Type Mass Flow Controller
- Calibration Gas N2
- Full Scale Flow Range 10 sccm
- Maximum Inlet Pressure 150 psig
- Normal Operating Pressure Differential 10 to 40 psid
- Proof Pressure 1000 psig
- Burst Pressure 1500 psig
- Fitting Type 4 VCR Male
- Control Range 0.2 — 10 sccm
- Flow Input Output Signal 0-5 VDC
- Connector Type 15-pin Type D (Tied Grounds)
- Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability ±0.3% of Reading
- Resolution 0.1% of Full Scale
- Zero Temperature Coefficient
- Span Temperature Coefficient
- Inlet Pressure Coefficient
- Typical Settling Time
- Warm-up Time 30 minutes
- Operating Temperature Range 10 — 50°C
- Storage Humidity 0 to 95% Relative Humidity, non-condensing
- Storage Temperature Range -20 to 80°C
- External Leak Integrity -09 (scc/sec He)
- Leak Integrity Through Closed Valve Up to 10K valve
- Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Seal Material Viton
- Surface Finish 16µ inch average Ra
- Weight 3 lbs (1.4 kg)
- CE Certified Yes
