Технические характеристики
- Type Mass Flow Controller
- Full Scale Flow Range 10000 sccm
- Control Range 2 — 10000 sccm
- Calibration Gas N2 (or equivalent)
- Fitting Type 0.25 in. tube
- Seal Material Viton
- Flow Input Output Signal 0 — 5 VDC
- Analog Connector 15-pin D-sub
- Maximum Inlet Pressure 150 psig
- Normal Operating Pressure Differential 15 — 40 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy ±1.0% of Full Scale (including non — linearity, hysteresis, and non — repeatability referenced to 760 mmHg and 0°C)
- Repeatability
- Resolution
- Zero Temperature Coefficient
- Span Temperature Coefficient
- Typical Settling Time
- Warm-up Time
- Operating Temperature 0 — 50°C
- External Leak Integrity -9
- Leak Integrity Through Closed Valve
- Wetted Materials 316L stainless steel, Viton®, nickel
- Compliance CE
