SiBrickScan (SBS) is a dedicated at-line system for the FTIR quantification of interstitial Oxygen in complete Silicon ingots, resulting in a precise concentration profile along the longitudinal axis. Accessing this information without sawing wafers or preparation of test samples is a major and cost saving advantage: qualify individual ingots before sawing and optimize the Si crystallization process! Unique SBS features: • High sensitivity with achievable Oxygen detection limits
Технические характеристики
CharacteristicsMeasured entityinterstitial oxygenMeasured valueconcentrationOther characteristicsfor silicon ingot