Fiber Optic Temperature Sensing for OEMs between -100 to 330ºC Advanced Energy’s Luxtron four-channel m924 and two-channel m922 semiconductor modules are designed for etcher and wafer fab equipment temperature monitoring of electrostatic chucks, chambers, and other devices. •Mix and match components •Works with current semiconductor Luxtron brand Fluoroptic probes and fiber optic extensions •Built-in calibration tables match to custom AE probes for high accuracy measurements •Accuracy of up to ±0.05°C is achievable (probe dependent) Overview The complete Luxtron® m920 series OEM solution is built using the electronics module assembly with two boards plus probes. The main board contains fiber optic temperature sensing channels, digital output (RS232 ASCII and RS485 Modbus), and power connection. The analog output board provides 0 to 10 V or 4 to 20 mA output and is mounted above the main board. An optional metal enclosure is also available. The m920 series system uses Fluoroptic® technology. The m920 series main board conditions the measurement signal from Fluoroptic probes and reports a calibrated temperature to the OEM control system. Benefits •Achieve high accuracy and a high temperature range for different etching and wafer fab processes •Monitor faster ramp conditions with a fast sample rate •Gain better temperature measurements with this low noise solution •Take advantage of high reliability for low failure rates •Receive support supports custom integration and probe designs world-wide
Технические характеристики
CharacteristicsOther characteristicsfiber optic
