The Edwards STPH301C ISO100K is an oil-free turbomolecular vacuum pump with a magnetically suspended rotor. It offers proven reliability and high performance for flexible process use. This pump is approved by major OEMs for semiconductor and magnetics industries.
Specifications:
- B71901010
- Pumping speed (N?/H?) , l/s: 300/200
- Inlet flange: ISO100K
- Output flange: KF40
- Maximum possible outlet pressure, Pa: 660
- Nominal rotation speed, rpm: 48000
- Engine power, kW: 0.6
- Series: STPH301
- Flange type: ISO
