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These compact and efficient small diaphragm vacuum pumps are Japanese made, especially designed for clean-room use, in the manufacture of semiconductor devices, for vacuum wands, vacuum desiccators or filter flasks. Diaphragm pumps are a proficient and environmentally friendly alternative to water jet pumps. They do not consume water or produce contaminated waste water.
Larger diaphragm pumps are available. However, larger diaphragm pumps are less noisier, require less maintenance, and achieve better ultimate vacuum and are cheaper than rotary pumps. The advantage of being totally oil-free also reduces contamination to the system.
Features:
- Built in inlet and outlet HEPA filters trap 99.97% of all particles down to 0.3 microns
- The filter windows let you know when to change HEPA filters
- Oil-free for cleanroom use
- Long term high reliability
- Designed to minimise noise generation
- Nylon body for static protection
- Compact design
- Compliance with CE regulations
- Supplied with a tube connector and tubing
- Electrostatic discharge safe tubing and static-dissipative grounding kit are available
Specifications:
Cat. No. VFV30
VFV60
Flow Rate 2.5L/min Pressure -40kPa -80kPa Electrical 100-120VAC or 220 — 240VAC
Consumption Power 5.0kWh 10.0kWh Dimensions (DxWxH) 132 x 76 x 67mm 140 x 80 x 140mm Weight 0.8kg 1.25kg Duty Cycle Continuous Life Expectancy >, 8760 hours Wafer Size Up to 6″ 8 and 12″
Replacement HEPA filter kit available:
- Built-in inlet and outlet HEPA filters trap 99.97% of all particles down to 0.3 microns
- Water filtering time is 20s (Do not let the pump «inhale» liquid)
- Pressure loss is 0.42kPa
- Manufacturer is ISO9001 certified
Considerations for low vacuum pump applications and selection
These pumps are recommended for use with Silicone Wafer Vacuum Wands
Технические характеристики
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