| Ambient Operating Temperature | |
| Ambient Storage Temperature | |
| Base Pressure | - -10 mbar <!— Base Pressure::
|
| Compression Ratio H2 | |
| Compression Ratio He | |
| Compression Ratio N2 | |
| Cooling Method | - <!— ‘multilineKeyVal pipe value’:Air cooling
- Water cooling
- —> Air cooling
- Water cooling
|
| Flange Type | |
| Foreline Flange Size | |
| Height | |
| Maximum Gas Throughput — Ar, Water Cooling | |
| Maximum Gas Throughput — N2, Water Cooling | |
| Noise Level | |
| Pumping Speed — H2 | |
| Pumping Speed — He | |
| Pumping Speed — N2 | |
| Standards and Certifications | - UNI EN 292-1 UNI EN 292-2 EN-CENELEC 55011 IEC 1000-4-2 (ex 801-2) IEC 1000-4-3 (ex 801-3) IEC 1000-4-4 (ex 801-4) EN 61010-1 (IEC 1010-1) EN 1012-2
|
| UNSPSC Code | |
| Weight | |