Технические характеристики
| Ambient Operating Temperature |
|
| Ambient Storage Temperature |
|
| Base Pressure |
|
| Compression Ratio H2 |
|
| Compression Ratio He |
|
| Compression Ratio N2 |
|
| Flange Type |
|
| Foreline Flange Size |
|
| Maximum Gas Throughput — Ar, Water Cooling |
|
| Maximum Gas Throughput — N2, Water Cooling |
|
| Noise Level |
|
| Pumping Speed — H2 |
|
| Pumping Speed — He |
|
| Pumping Speed — N2 |
|
| Standards and Certifications |
|
| Weight |
|





